(1x10-10 to 9x10-2) scm3/S
2.7 % Best Uncertainty* (±)

*Best Uncertainty” is the smallest uncertainty of measurement that a laboratory can achieve within its scope of accreditation when performing more or less routine calibrations of nearly ideal measurement standards of nearly ideal measuring equipment. Best uncertainties represent expanded uncertainties expressed at approximately the 95 % level of confidence, usually using a coverage factor of k = 2. The best uncertainty of a specific calibration performed by the laboratory may be greater than the best uncertainty due to the behavior of the customer’s device and to influences from the circumstances of the specific calibration.

• 10-3 to 10-7 torr
• 3.5 % Best Uncertainty* (±)

ROUGH VACUUM GAUGES
Thermocouple, Pirani, Convection and Capacitance Manometers

• (1000 to 1x10-1) torr
• .16 % Best Uncertainty* (±)
• 1x 10-1 to 1x 10-3) torr
• .51 % Best Uncertainty* (±)